RTS-3000M

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반도체 전용 검사장비

RTS-3000M

Advanced Macro Wafer Defect Inspection System

  

 

Total solution for 200mm & 300mm Wafer defect Inspection

Designed for absolute separation between Main Frame and Stage & Optic (Anti-Vibration Design)

Cradle Structure for measuring stage (Economical system size)

Pneumatic Isolator installation for free vibration

Integrated Module design for Edge Inspection